|Grating set TGS1F|
Calibration grating set TGS1F is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4 with different step heights.
|Structure:||- Si wafer
- the grating is formed on the layer of SiO2
|Pattern types:||1- Dimensional (in Z-axis direction)|
|Step height:||TGZ1 - 20,0±1.5 nm*
TGZ2 - 110±2 nm*
TGZ3 - 520±4 nm*
TGZ4 - 1400±10 nm*
|Chip size:||5x5x0.5 mm|
|Effective area:||central square 3x3 mm|
Fig.1 SEM photo of TGZ3 grating
* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm).